Product Details
MOCVD Scrubber
MOCVD (Metal Organic Chemical Vapor Deposition) is a technology used in semiconductor industry, including LEDS, Lasers, Solar cells and field effect transistors. This technology is used to deposit very thin layers of atoms onto a semiconductor wafer. It is the most important manufacturing MOCVD process for III – V semiconductors, especially based on Gallium Nitride (GaN).
Product CatalogueDescription
MOCVD Scrubber
MOCVD Scrubber
MOCVD (Metal Organic Chemical Vapor Deposition) is a technology used in semiconductor industry, including LEDS, Lasers, Solar cells and field effect transistors. This technology is used to deposit very thin layers of atoms onto a semiconductor wafer. It is the most important manufacturing MOCVD process for III – V semiconductors, especially based on Gallium Nitride (GaN).
Apzem approach is to eliminate fumes from CVD process using adsorption technology. Specialized adsorption media will be used to get higher removal capacity rather than normal media. The saturated media can be disposed easily in non-hazardous landfills.
- Performance Guaranteed
- Low maintenance
- Low pressure drop, Minimal energy cost
- No water, ETP is not required
- No hazardous by-product
- Chemical Reactor vents
- Laboratory
- Hospital
- Food processing area
- Storage tank vent
- Air flow rate from 50 CFM to 2000 CFM
- Concentration: 1 ppm to 200 ppm (continuous) up to 2000 ppm (Intermittent)
- Removal efficiency: up to 99.99 %
- Material of Construction: MS with Epoxy lining
- Construction: Heavy Gauge, Fully welded cabinet, robust construction
Dimensions
Model | Air flow rate (CFM) | Dimension
Diameter (mm) |
Height (mm) |
ADS-30 | 100 | 300 | 1400 |
ADS-45 | 300 | 450 | 1500 |
ADS-60 | 500 | 600 | 1500 |
ADS-75 | 800 | 750 | 1650 |
ADS-90 | 1000 | 900 | 1700 |
ADS-105 | 1500 | 1050 | 2000 |
ADS-120 | 2000 | 1200 | 2200 |
https://www.apzem.in/index.php/product/mocvd-scrubber/
lower: Direct drive, High efficiency, Low noise